Téléchargez le livre : CCD Image Sensors in Deep-Ultraviolet

CCD Image Sensors in Deep-Ultraviolet

Degradation Behavior and Damage Mechanisms de

,

Éditeur :

Springer


Collection :

Microtechnology and MEMS

Paru le : 2006-01-05

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Description
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
Pages
232 pages
Collection
Microtechnology and MEMS
Parution
2006-01-05
Marque
Springer
EAN papier
9783540226802
EAN PDF
9783540274124
Informations sur l'ebook
Nombre pages copiables
2
Nombre pages imprimables
23
Taille du fichier
2181 Ko
Prix
147,69 €

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