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Télécharger le livre : Principles of Plasma Discharges and Materials Processing
Allan J. Lichtenberg , Michael A. Lieberman
Principles of Plasma Discharges and Materials Processing
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors,...
Editeur : Wiley
Parution : 2024-08-28

Format(s) : PDF, ePub
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